Online Documentation:Configuration Manual
Product Spec Definitions used in Data Entries
By using
Spec Definitions in Name Value Pair Definitions
it is possible to cross check entered values (or calculated values based on entered
values) with Part Specifications. E.g. you have a General Measurement
Step Definition, that is used for different products (Each product has a
different Part Definition).
The result of the measurement should be checked with the specifications of the part
to determine if the Traveler can continue or not. One possible implementation is
to use Input - Output
specific data entries for which you define process specifications
An other possible implementation is to use Spec Definitions. A step by step example
is given below. The following steps will be discussed:
Define the Spec Definition and the Spec Value
To create a data entry that is checked with a product spec, take the following steps:
-
Create a Spec Definition. A single
Spec Definition can be used for multiple
Part Definitions. (E.g. A Wafer thickness measument. The same Step Definition
can be used for different Wafer types with different specified Wafer thickenesses)
- Attach the Spec Definition to
a Part Definition on the Specification Tab on the
Part Definition Dialog. When the Spec Definition is attached, a spec value
can be assigned for this specific Product.
The figure below is showing Min and Max Thickness Specs for Wafer Part Definition
WFR-01 Rev A (Other Wafers with different Part Definitions can have different max
and min values, but still use the same Spec Definitions):
In this case 'WFR-01 Rev A' has a value of 550 for the 'SP-001 Max Wafer Thickness
[um]' Spec Definition, and a value of 450 for the 'SP-002 Min Wafer Thickness [um]'
Spec Definition.
Create Data Entries for the Wafer Thickness Check
After creating the spec values on the Part Definition the
Name Value Pair can be defined. Below an example is given for the 'Average
Wafer thickness' which is the result of 5 measurement values that are entered by
the Operator.
First a
Step Definition has to be created that is used to measure the Wafer Thickness
(TEST-01 Rev A). On this Step Definition
the Data Entries for the thickness
measurement can be defined. Using a Calculated Data Entry the
'Average Wafer Thickness' value can be determined.
The following figure show how the create a PASS / FAIL value for the 'Average Wafer
Thickness'. This value is an
Calculated Data Entry as well.
First you have to add the PASS / FAIL value to the list of Name-Value Pairs before
you can start editing the attributes that are used to access the Spec Values.
Add in the Spec Values and the Condition
After the PASS / FAIL Name-Value Pair
is added to the listbox the Name-Value Pair can be clicked to open the Name-Value
Pair Dialog. This dialog is shown in the following figure:
The Spec Values can be added by Selecting the
Spec Definitions for the 'Variable SP' pulldown, assigning a name to them
and add them to the 'Variable(s)' list by clicking the plus sign.
The following expression is used to assign a 'PASS' text value or an 'FAIL' text
value to the 'PASS / FAIL' field
IFF([A]>[C], 'FAIL', IIF([A]<[B], 'FAIL', 'PASS'))
with
- [A] = TEST-01: Average Wafer Thickness
- [B] = Spec: SP-002 Min Wafer Thickness [um]
- [C] = Spec: SP-001 Max Wafer Thickness [um]
If the resulting value equals to 'PASS' the Traveler will be able to continue to
the next step.
How it Works out on the Traveler
The following figure shows how the configuration for the check on Spec Values will
work out on a Traveler:
In this case the calculated 'Average Wafer Thickness' does not meet the minimum
value requirement of 450 micron. So the operator is notified at the moment she wants
to move the Traveler to the next step.
Useful Links
Click one of the following links to learn more: